ILS Series positioning stages have been developed as buffers at each stage of glass substrate processing for simply positioning glass substrates buffer cassettes.
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ILS-150 Cleanroom Ball Transfer
Product Weight 3.3 lbs Moving Distance ± 0.591″ Load Capacity 331 lbf Recommended Air Pressure Case Aluminum + Alumite Fixing flange Aluminum + Alumite Moving stage SUS304 Download CAD File
PDF File -
ILS-150S Cleanroom Ball Transfer
Product Weight 3.97 lbs Moving Distance ± 0.591″ Load Capacity 331 lbf Recommended Air Pressure 0.20 MPa (2kgf/cm2) Case Aluminum + Alumite Fixing flange Aluminum + Alumite Moving stage SUS304 Download CAD File
PDF File